vtm

   SEMICONDUCTORS

- Sputtering targets for Semiconductors

  Material Name Composition [wt%] Purity
  Ag Silver 100% 3N7, 4N, 5N
  Al Aluminum 100% 5N, 5N5
  AlSi Aluminium Silicon various 5N, 5N5
  AlSiCu Aluminium Silicon Copper various 5N, 5N5
  Au Gold 100% 4N, 5N
  AuAs Gold Arsenic AuAs0,4 4N, 5N
  AuGe Gold Germanium AuGe12 4N, 5N
  AuPt Gold Platinum various 4N
  AuSb Gold Antimon AuSb0,5 (30) 4N, 5N
  AuSn Gold Tin AuSn20 (25, 30) 4N, 5N
  AuZn Gold Zinc AuZn2 (5) 4N
  CoFeB Cobalt Iron Boron various 4N, 4N5
  Cr Chromium 100% 3N, 3N5
  CrNiAl Chromium Nickel Aluminium various 3N, 3N5
  CrSi Chromium Silicon CrSi50 3N
  Cu Copper 100% 4N5, 5N
  CuCr Copper Chromium CuCr50 3N5
  CuNi Copper Nickel various 3N5
  Hf Hafnium 100% 3N (excl. Zr)
  Ir Iridium 100% 3N
  Mo Molybdenum 100% 3N5
  MoSi Molybdenum Silicon 100% 3N5
  Ni Nickel 100% 3N5
  NiAl Nickel Aluminium various 3N5, 3N8
  NiCr Nickel Chromium various 3N, 3N5
  NiCrAl Nickel Chromium Aluminium NiV7 3N, 3N5
  NiCrAlSi Nickel Chromium Aluminium Silicon OsRu20 3N, 3N5
  NiCrSi Nickel Chromium Silicon 100% 3N, 3N5
  NiPt Nickel Platinum various 3N
  NiV Nickel Vanadium NiV7 3N5
  OsRu Osmium Ruthenium OsRu20 3N5
  Pd Palladium 100% 3N5, 4N
  Pt Ruthenium 100% 3N5, 4N
  Ru Nickel Chromium Silicon 100% 2N8, 3N, 3N8
  Si Silicon 100% 5N
  Ta Tantalum 100% 3N5
  TaAl Tantalum Aluminium various 3N5
  TaSi Tantalum Silicon 100% 3N, 4N, 4N5, 5N
  Ti Titanium 100% 3N, 4N, 4N5, 5N
  TiW Titanium Tungsten TiW10 4N5
  Tungsten Tungsten 100% 3N5
  WSi Tungsten Silicon TiW10 4N5

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