- Sputtering targets for Semiconductors
| Material | Name | Composition [wt%] | Purity |
|---|---|---|---|
| Ag | Silver | 100% | 3N7, 4N, 5N |
| Al | Aluminum | 100% | 5N, 5N5 |
| AlSi | Aluminium Silicon | various | 5N, 5N5 |
| AlSiCu | Aluminium Silicon Copper | various | 5N, 5N5 |
| Au | Gold | 100% | 4N, 5N |
| AuAs | Gold Arsenic | AuAs0,4 | 4N, 5N |
| AuGe | Gold Germanium | AuGe12 | 4N, 5N |
| AuPt | Gold Platinum | various | 4N |
| AuSb | Gold Antimon | AuSb0,5 (30) | 4N, 5N |
| AuSn | Gold Tin | AuSn20 (25, 30) | 4N, 5N |
| AuZn | Gold Zinc | AuZn2 (5) | 4N |
| CoFeB | Cobalt Iron Boron | various | 4N, 4N5 |
| Cr | Chromium | 100% | 3N, 3N5 |
| CrNiAl | Chromium Nickel Aluminium | various | 3N, 3N5 |
| CrSi | Chromium Silicon | CrSi50 | 3N |
| Cu | Copper | 100% | 4N5, 5N |
| CuCr | Copper Chromium | CuCr50 | 3N5 |
| CuNi | Copper Nickel | various | 3N5 |
| Hf | Hafnium | 100% | 3N (excl. Zr) |
| Ir | Iridium | 100% | 3N |
| Mo | Molybdenum | 100% | 3N5 |
| MoSi | Molybdenum Silicon | 100% | 3N5 |
| Ni | Nickel | 100% | 3N5 |
| NiAl | Nickel Aluminium | various | 3N5, 3N8 |
| NiCr | Nickel Chromium | various | 3N, 3N5 |
| NiCrAl | Nickel Chromium Aluminium | NiV7 | 3N, 3N5 |
| NiCrAlSi | Nickel Chromium Aluminium Silicon | OsRu20 | 3N, 3N5 |
| NiCrSi | Nickel Chromium Silicon | 100% | 3N, 3N5 |
| NiPt | Nickel Platinum | various | 3N |
| NiV | Nickel Vanadium | NiV7 | 3N5 |
| OsRu | Osmium Ruthenium | OsRu20 | 3N5 |
| Pd | Palladium | 100% | 3N5, 4N |
| Pt | Ruthenium | 100% | 3N5, 4N |
| Ru | Nickel Chromium Silicon | 100% | 2N8, 3N, 3N8 |
| Si | Silicon | 100% | 5N |
| Ta | Tantalum | 100% | 3N5 |
| TaAl | Tantalum Aluminium | various | 3N5 |
| TaSi | Tantalum Silicon | 100% | 3N, 4N, 4N5, 5N |
| Ti | Titanium | 100% | 3N, 4N, 4N5, 5N |
| TiW | Titanium Tungsten | TiW10 | 4N5 |
| Tungsten | Tungsten | 100% | 3N5 |
| WSi | Tungsten Silicon | TiW10 | 4N5 |
